Notice of Intent to Acquire Optical Microscope

Announcement Type: Special Notice Code: 6695 Announcement Number: NIST-SS26-103 Subject: Notice of Intent to Noncompetitively Acquire Optical Microscope - Nikon Metrology (UEI: NP7BRVCLFN51) The Alternative Computing Group in the Physical Measurement Laboratory (PML) Division 683 conducts research addressing the rapidly expanding measurement needs of new hardware for artificial intelligence, exploring emerging computing hardware, architectures and algorithms, and developing chip-based test vehicles for massively parallel measurements. A significant portion of this work involves procurement of CMOS wafers up to 8” (200 mm) in diameter from foundries, and integrating custom nanoscale devices on top of them, either in the NIST NanoFab or through research partnerships and CRADAs with universities and companies. A crucial step in this research is the microscopic inspection of whole wafers to characterize them, in particular highlighting any defects that may be present. For this purpose, NIST requires an optical microscope capable of observing 200 mm wafers at a range of magnifications extending to at least 100X. To allow stitching together of an array of images to cover large portions of the wafer, an encoded motorized stage and software are required. NIST intends to award a non-competitive contract to Nikon Metrology for an optical microscope to be used for inspection of custom VLSI wafers both before and after addition of specialized devices by NIST personnel in NIST's CNST clean room and by research collaborators. This notice is not a request for a quotation. A solicitation document will not be issued, and quotations will not be requested. This acquisition is being conducted under the authority of RFO 12.102(a). The North American Industry System (NAICS) code for this acquisition is 334516, Analytical Laboratory Instrument Manufacturing. NIST requires a solution that meets the following minimum

requirements: Has a collection of

objectives, including a 100x apochromat

objective with numerical aperture (NA) at least 0.9 and working distance (WD) at least 2 mm; Is compatible with brightfield, darkfield, and differential interference (DIC) contrast mechanisms; Can accommodate wafers up to 8" (200 mm) in size; Has a fully motorized stage with encoder, allowing acquisition of stitched images; Has a stage speed of up to 240 mm/s; (6) includes a scientific color CMOS-based camera with sensor at least 35.8 mm x23.8 mm, pixel count 6000 x 3984 or greater and pixel size 6 um x 6 um or larger; and Includes all software necessary for complete control of motorized components and camera, allowing acquisition of precision stitched images. After thorough evaluation, it has been determined that the optical microscope from manufacturer, Nikon Metrology, is essential for several reasons: Technical: Only Nikon can supply a 100x apochromat

objective with numerical aperture (NA) at least 0.9 and working distance (WD) at least 2 mm. Other manufacturers of optical microscopes cannot meet this requirement. Based on market research, other manufacturers cannot simultaneously meet the requirement of an apochromatic 100X

objective, a NA of 0.9, and a WD of 2 mm. Other manufacturers' 100X apochromatic