Chips R&D Beamline Gas Analyzer - Combined Sources Sought

THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE The National Institute of Standards and Technology (NIST) is seeking information from sources that may be capable of providing a high speed, Lock-in/Servo system. If no alternate sources are identified, the Government intends to issue a Sole Source Award to Newport Corp, 31950 Frontage RD, Bozeman, Montana, 59715 (UEI: EP8ZPBVV6RL4) under the authority of FAR 12.102(b) The North American Industry System (NAICS) code for this acquisition is 334516. NIST has a need for a Beamline Residual Gas Analyzer that meets or exceeds the following draft minimum specifications:

BACKGROUND The National Institute of Standards and Technology (NIST), Physical Measurements Laboratory (PML) Sensor Science Division’s, Optical Radiation Group is improving NIST’s capability to provide calibration measurements of mirror reflectivity and detector responsivity in the extreme ultraviolet region. These programs support both the EUV Lithography technology currently deployed in semiconductor fabs and industry’s “Beyond EUV” research programs that will develop the next generation of lithography processes at shorter wavelengths. The CHIPS-Metrology program 2.13 “Reflectometry and Detector Calibrations at SURF III Supporting the Future of EUVL” will improve the uncertainty and availability of these measurements by designing, fabricating, and installing two new beamlines at NIST’s SURF III synchrotron radiation facility. Beamlines on the SURF III synchrotron radiation facility must meet rigorous criteria for the composition of the residual gas, ensuring a clean, ultra-high vacuum system. These RGA units are required to analyze the residual gas composition and quantify the amount of high molecular mass species. Meeting these vacuum criteria is critical to protect both the SURF III accelerator system and the individual beamline. High mass components in the residual gas will contaminate the interior surfaces of vacuum chambers where they prevent the system from achieving the required vacuum levels. Additionally, the contaminants interact with the EUV radiation in the beamlines and contaminate optics, degrading their performance and possible rendering them unfit for purpose. To protect the accelerator and the beamlines, the SURF III facility enforces a vacuum cleanliness policy that requires the use of Residual Gas Analyzers (RGA). Description: Residual Gas Analyzer, MKS model 669-221-021 (MicroVision 2 with 200 amu mass range, double mass filter, ultra-high-vacuum, Thoria filament) Quantity: Five (5) Technical Specifications Compatible with ultra-high vacuum (UHV) systems Mass range from 1 amu to 200 amu (or greater) Double quadrupole mass filter Dual Faraday and Electron Multiplier detection with sensitivity to 5e‑14 mbar (or lower) and 1e‑4 mbar (or higher) Thoria filament Ethernet communications with computer Control via computer interface of RGA parameters including at minimum: peak resolution, mass calibration, emission current, electron energy, ion energy, QMS filter pole bias voltage Contractor-provided software for operation, parameter adjustment, calibration, data display, and saving data to disk compatible with Windows operating system. NIST conducted market research from December 2025 to April 2026 by speaking with colleagues, performing internet searches, and speaking with vendors to determine what sources could meet NIST’s minimum

requirements. The results of that market research revealed that only Newport Corp (UEI: EP8ZPBVV6RL4) appears to be capable of meeting NIST’s

requirements. HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response. Submit the response by email to the and, if specified, to the Secondary

Point of Contact listed at the bottom of this notice as soon as possible, and preferably before the closing date and time of this notice. Provide the complete name of your company, address, name of contact for follow-up

questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI). Details about what your company is capable of providing that meets or exceeds NIST’s minimum