Precision Achromatic Doublet Lenses

Sought after COMMERCE, DEPARTMENT OF NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY NT AND SUPPLIES Sources Sought Notice for

BACKGROUND The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. NIST is embarking on a project to support the EUV lithography (EUVL) community by developing characterization of EUV scintillator materials. Many techniques for measuring spatial distribution (or image) of EUV rely on scintillators or devices that convert EUV radiation into visible light. Scintillators tend to be robust and afford the user the ability to use less costly and easier to characterize, visible light detection or imaging systems. However, their characterization requires specialized techniques and hardware which NIST must develop in order to provide accurate characterization of the performance of EUV scintillators. This procurement is for three custom optical lens doublets designed specifically for an optical microscope assembly for measuring the visible light output of scintillator samples. The National Institute of Standards and Technology (NIST) has a requirement for three custom optical lens doublets designed specifically for an optical microscope assembly for measuring the visible light output of scintillator samples. NIST is seeking information from sources that may be capable of providing a solution that will provide the

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